A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges

  • Authors:
  • Michael S. Barnes;Tina J. Cotler;Michael E. Elta

  • Affiliations:
  • Univ. of Michigan, Ann Arbor;Univ. of Michigan, Ann Arbor;Univ. of Michigan, Ann Arbor

  • Venue:
  • Journal of Computational Physics
  • Year:
  • 1988

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Abstract