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This paper is a contribution to the development of evaluation methods in general and in particular of the evaluation of document analysis systems (DAS). We give a general concept of benchmarking DAS and present a method to benchmark single modules of a DAS where we focus on the definition and generation of ground truth (GT) especially of the image processing modules of a DAS. The proposed method describes how to build a data base with specific ground truth for the output of each module of interest. Another method to build a data base for benchmarking more generally is to use synthetic data. Here, we do not treat such methods.