Model-based signal conditioning for high-speed atomic force and friction force microscopy

Authors:
G. Schitter;A. Stemmer
Affiliations:
Nanotechnology Group, Swiss Federal Institute of Technology, ETH Center CLA, Tannenstrasse 3, CH-8092 Zurich, Switzerland;Nanotechnology Group, Swiss Federal Institute of Technology, ETH Center CLA, Tannenstrasse 3, CH-8092 Zurich, Switzerland
Venue:
Microelectronic Engineering
Year:
2003

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Abstract

The imaging speed of atomic force microscopy (AFM) is limited due to the dynamics of the piezo scanner along the scanning direction. This article presents the identification and open-loop control of a piezoelectric tube scanner to enable fast imaging. By applying a model based open-loop control the dynamic behaviour of the piezo tube can be compensated. The lateral displacement error is reduced and topographical artifacts, additional cantilever deflection, modulation of the tip-sample interaction force, and modulation of the relative tip-sample velocity vanish. The open-loop controlled AFM scanner enables imaging at a line scan rate of 122 Hz, which is about 15 times faster than standard systems.