Automated Quality Control for Micro-Technology Components Using a Depth from Focus Approach

Authors:
Daniel Schaper
Affiliations:
-
Venue:
SSIAI '02 Proceedings of the Fifth IEEE Southwest Symposium on Image Analysis and Interpretation
Year:
2002

Citing 0
Cited 1

Reading from Scratch --- A Vision-System for Reading Data on Micro-structured Surfaces

Proceedings of the 31st DAGM Symposium on Pattern Recognition

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Abstract

This paper describes an optical approach to verify the geometric accuracy of object surfaces structured by an excimer laser. Due to the restricted space in the excimer laser system a passive optical approach is chosen to be integrated in the system. Different optical techniques are compared. Their advantages and disadvantages for the use of integrating them in a laser system are discussed in the paper. The depth from focus approach is presented to create 3d models of surfaces structured by a laser and experimental results are shown. A prospective is given for implementing a control loop during runtime for the laser system.