Computer Aided Tolerance Analysis and Synthesis in Micro Systems (μ-ToAST)

  • Authors:

  • Christoph Germer;Ulli Hansen;Hans-Joachim Franke;Stephanus Büttgenbach

  • Affiliations:

  • Institute for Engineering Design, Technical University of Braunschweig, Germany. c.germar@tu-bs.de;Institute for Microtechnology, Technical University of Braunschweig, Germany;Institute for Engineering Design, Technical University of Braunschweig, Germany;Institute for Microtechnology, Technical University of Braunschweig, Germany

  • Venue:
  • Analog Integrated Circuits and Signal Processing
  • Year:
  • 2004

Quantified Score

Hi-index 0.00

Visualization

Abstract

The large variety of the technologies and physical, chemical or biochemical effects united in micro systems requires a new generation of quality assurance. An appropriate quality management should check all conceivable influences on the product and perform a complete tolerance synthesis based on its function and with regard to manufacturing and cost optimization. In the following a new approach to function-oriented tolerance analysis and synthesis is presented.The authors have developed a computer program which assists Design Engineers in tolerance analysis and synthesis in micro technology. This contribution presents the theoretical background and the basic functionality of this software. For a better understanding a short MEMS example is shown.