Architectural-level synthesis of digital microfluidics-based biochips
Proceedings of the 2004 IEEE/ACM International conference on Computer-aided design
High-level synthesis of digital microfluidic biochips
ACM Journal on Emerging Technologies in Computing Systems (JETC)
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In this paper, we first present an efficient physical level simulationmethod for the dynamic analysis of electrostatic micro-electro-mechanicalsystems (MEMS). This method is then used to analyzeMEMS dynamics. Stiffness hardening or softening of MEM structureshas been shown to depend both on the applied voltage andthe geometry. The existence of multiple resonant peaks in the frequencyresponse diagram has been presented. We have shown thata DC bias along with an appropriate AC bias can give fast switchingat a considerably less peak power requirement. Finally, a reducedorder model has been developed based on Karhunen-Loèvedecomposition for the dynamic simulation of MEMS. Reduced ordermodels are cheap in terms of memory and computational timeand are needed to perform fast and efficient system-level compositecircuit and micro-mechanical simulations.