Introduction to simulation and SLAM II (4th ed.)
Introduction to simulation and SLAM II (4th ed.)
Simulation framework for complex manufacturing systems with automated material handling
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Methodology to best extend AMHS for site expansion
Proceedings of the Winter Simulation Conference
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This paper studies the operational logic in an inter-bay automated material handling system (AMHS) in semiconductor wafer fabrication. This system consists of stockers located in a two-floor layout. Automated moving devices transfer lots between stockers within the same floor (intra-floor lot transfer) or between different floors (inter-floor lot transfer). Intra-floor lot-transferring transports use a two-rail one-directional system, whereas inter-floor lot-transferring transports use lifters. The decision problem consists of selecting rails and lifters that minimize average lot-delivery time. Several operation rules to deliver lots from source stocker to destination stocker are proposed and their performance is evaluated by discrete event simulation.