Evolutionary computation applied to the tuning of MEMS gyroscopes

  • Authors:

  • Didier Keymeulen;Wolfgang Fink;Michael I. Ferguson;Chris Peay;Boris Oks;Richard Terrile;Karl Yee

  • Affiliations:

  • California Institute of Technology, Pasadena, CA;California Institute of Technology, Pasadena, CA;California Institute of Technology, Pasadena, CA;California Institute of Technology, Pasadena, CA;California Institute of Technology, Pasadena, CA;California Institute of Technology, Pasadena, CA;California Institute of Technology, Pasadena, CA

  • Venue:
  • GECCO '05 Proceedings of the 7th annual conference on Genetic and evolutionary computation
  • Year:
  • 2005

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Abstract

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.