Microsystem design
Design of Compliant Mechanisms: Applications to MEMS
Analog Integrated Circuits and Signal Processing
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In this work a procedure for the optimal design of flexural hinges to be microfabricated by a lithographic process is proposed. The structural optimization problem is approached by coupling a parametric finite element model to an optimization algorithm. A computer code was developed to generate the mesh at each optimization step accordingly to the values of the design parameters provided by an optimization toolbox. The objective function is the rotation of the mechanism, which must be maximized. The solution is constrained by strength and kinematical requirements. The notch shape is described by spline functions according to an original procedure developed by the authors. Results show that, with respect to the usual design approach, the proposed method permits a significant improvement of the hinge characteristic to be obtained.