Finite Element Method for Epitaxial Growth with Thermodynamic Boundary Conditions

  • Authors:
  • Eberhard Bänsch;Frank Hausser;Axel Voigt

  • Affiliations:
  • -;-;-

  • Venue:
  • SIAM Journal on Scientific Computing
  • Year:
  • 2005

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Abstract

We develop an adaptive finite element method for island dynamics in epitaxial growth. We study a step-flow model, which consists of an adatom (adsorbed atom) diffusion equation on terraces of different height; thermodynamic boundary conditions on terrace boundaries including anisotropic line tension; and the normal velocity law for the motion of such boundaries determined by a two-sided flux, together with the one-dimensional anisotropic ``surface'' diffusion (edge diffusion) of edge adatoms along the step edges. The problem is solved using independent meshes: a two-dimensional mesh for the adatom diffusion and one-dimensional meshes for the boundary evolution. A penalty method is used to incorporate the boundary conditions. The evolution of the terrace boundaries includes both the weighted/anisotropic mean curvature flow and the weighted/anisotropic edge diffusion. Its governing equation is solved by a semi-implicit front-tracking method using parametric finite elements.