Design improvements for a linear hybrid step micro-actuator

Authors:
M. Hahn;R. Gehrking;B. Ponick;H. H. Gatzen
Affiliations:
Institute for Microtechnology, University of Hanover, Schoenebecker Allee 2, 30823, Garbsen, Germany;Institute for Drive Systems and Power Electronics, University of Hanover, Welfengarten 1, 30167, Hanover, Germany;Institute for Drive Systems and Power Electronics, University of Hanover, Welfengarten 1, 30167, Hanover, Germany;Institute for Microtechnology, University of Hanover, Schoenebecker Allee 2, 30823, Garbsen, Germany
Venue:
Microsystem Technologies - Special issue: Colloquium on Micro Production, Aachen, Germany, 2-3 March 2005
Year:
2006

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Abstract

To increase the driving force as well as to reduce tolerance issues during assembly, a linear hybrid step micro-actuator developed within the cooperation time was subjected to a redesign. FEM simulation results show that, by doubling of the micro-actuator footprint in conjunction with a selective increase of the micro-actuator building height, an increase of the driving force could be achieved. At the same time, the nominal air gap could be doubled, thus substantially reducing critical assembly tolerances. This paper describes redesign considerations and present FEM simulation results for the redesign.