Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing

Authors:
Rachel T. Johnson;Feng Yang;Bruce E. Ankenman;Barry L. Nelson
Affiliations:
Northwestern University, Evanston, IL;Northwestern University, Evanston, IL;Northwestern University, Evanston, IL;Northwestern University, Evanston, IL
Venue:
WSC '04 Proceedings of the 36th conference on Winter simulation
Year:
2004

Citing 3
Cited 1

Asymptotic formulas for Markov processes with applications to simulation

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Improved Design of Queueing Simulation Experiments with Highly Heteroscedastic Responses

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D-Optimal Sequential Experiments for Generating a Simulation-Based Cycle Time-Throughput Curve

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Comparing designs for computer simulation experiments

Proceedings of the 40th Conference on Winter Simulation

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Abstract

This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The meta-model used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating that, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).