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Proceedings of the 30th conference on Winter simulation
Integrating targeted cycle-time reduction into the capital planning process
Proceedings of the 30th conference on Winter simulation
Operational modeling and simulation in semiconductor manufacturing
Proceedings of the 30th conference on Winter simulation
Simulation Modeling and Analysis
Simulation Modeling and Analysis
Simulation with Arena
Simulation standards: a framework for standard modular simulation
Proceedings of the 34th conference on Winter simulation: exploring new frontiers
Manufacturing case studies: generic case studies for manufacturing simulation applications
Proceedings of the 35th conference on Winter simulation: driving innovation
Proceedings of the 35th conference on Winter simulation: driving innovation
Automatic generation of simulation models for semiconductor manufacturing
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Winter Simulation Conference
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This paper presents the application of a framework, proposed by the National Institute of Standards and Technology (NIST), for standard modular simulation in semiconductor wafer fabrication facilities (fabs). The application of the proposed framework resulted in the identification and specification of four different elements in the context of semiconductor fabs: (1) market sector, (2) hierarchical modeling levels, (3) simulation case studies, (4) models and data. An example of the application of the proposed simulation framework to a benchmark semiconductor fab model, the so-called Mini-fab, is presented. In this example, evaluation of production performance under different workforces is studied. Current and future research is focused on the improvement of the proposed framework (e.g., design and testing of generic case studies).