Study on the surface roughness of substrate with multi-fractal spectrum

  • Authors:

  • Shuyi Gan;Qing Zhou;Xiangdong Xu;Yilin Hong;Yin Liu;Shaojun Fu

  • Affiliations:

  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, PR China and Department of Mechanical Engineering, Hefei University of Technology, Hefei 230 ...;Department of Mechanical Engineering, Hefei University of Technology, Hefei 230009, PR China;National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, PR China;National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, PR China;National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, PR China;National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, PR China

  • Venue:
  • Microelectronic Engineering
  • Year:
  • 2007

Quantified Score

Hi-index 2.89

Visualization

Abstract

This paper applies multi-fractal spectrum theory into surface roughness evaluation in order to eliminate its heavy dependence on sampling position and sampling size. Based on AFM images of various substrates, their partition functions and multi-fractal spectra are calculated. The calculation indicates that the multi-fractal spectra differ significantly from each other for different samples, but are quite similar for the same sample in spite of the random change of sampling position and size, so it can reflect surface feature more objectively and accurately.