Simulation results and formalism for global-local scheduling in semiconductor manufacturing facilities

  • Authors:
  • Mickaël Bureau;Stéphane Dauzère-Pérès;Claude Yugma;Leon Vermariën;Jean-Bernard Maria

  • Affiliations:
  • Ecole des Mines de Saint-Etienne, Quarter Saint-Pierre, Gardanne, France;Ecole des Mines de Saint-Etienne, Quarter Saint-Pierre, Gardanne, France;Ecole des Mines de Saint-Etienne, Quarter Saint-Pierre, Gardanne, France;STMicroelectronics, Rousset, France;STMicroelectronics, Rousset, France

  • Venue:
  • Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
  • Year:
  • 2007

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Abstract

This article deals with an approach for managing scheduling in semiconductor manufacturing facilities. The proposed approach ensures consistency between global and local scheduling decisions, by ensuring that global objectives are met through dynamic adaptation of the local behavior. This approach is validated by simulation. After describing the context and the framework of the approach, we introduce the formalism and present first simulation results obtained on real data of the fab of STMicro-electronics, Rousset. The experimental tests are promising since substantial improvements are obtained on criteria such as cycle time, number of completed lots, etc.