A comparison study of the logic of four wafer fabrication simulators
WSC '96 Proceedings of the 28th conference on Winter simulation
Proceedings of the 32nd conference on Winter simulation
A discrete event simulation model simplification technique
WSC '05 Proceedings of the 37th conference on Winter simulation
Improved simple simulation models for semiconductor wafer factories
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Integrated maintenance scheduling for semiconductor manufacturing
CPAIOR'10 Proceedings of the 7th international conference on Integration of AI and OR Techniques in Constraint Programming for Combinatorial Optimization Problems
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
Challenges and solution approaches for the online simulation of semiconductor wafer fabs
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
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We describe a discrete event simulator developed for daily prediction of WIP position in an operational 300mm wafer fabrication factory to support tactical decision-making. The simulator is distinctive in that its intended prediction horizon is relatively short, on the order of a few days, while its modeling scope is relatively large. The simulation includes over 90% of the wafers being processed in the fab and all process, measurement and testing tools. The model parameters are automatically updated using statistical analyses performed on the historical event logs generated by the factory. This paper describes the simulation model and the parameter estimation methods. A key requirement to support daily and weekly decision-making is good validation results of the simulation against actual fab performance. Therefore, we also present validation results that compare simulated production metrics against those obtained from the actual fab, for fab-wide, process, tool and product specific metrics.