WIP evolution of a semiconductor factory after a bottleneck workcenter breakdown
Proceedings of the 30th conference on Winter simulation
CONLOAD—a new lot release rule for semiconductor wafer fabs
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Proceedings of the 32nd conference on Winter simulation
A full-factory simulator as a daily decision-support tool for 300mm wafer fabrication productivity
Proceedings of the 40th Conference on Winter Simulation
Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model
Proceedings of the 40th Conference on Winter Simulation
Controlled simplification of material flow simulation models
Winter Simulation Conference
Cycle time distributions of semiconductor workstations using aggregate modeling
Winter Simulation Conference
Single toolset modeling approaches in semiconductor manufacturing
Proceedings of the Winter Simulation Conference
Aggregate modeling of semiconductor equipment using effective process times
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
Single-server aggregation of a re-entrant flow line
Proceedings of the Winter Simulation Conference
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Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundreds of machines of different types, and automated transport lead to a system complexity which is hard to understand and hard to handle. For educating planners and developing adequate material flow control mechanisms, simple models for this complex environment are required. Several years ago, we published some first approaches which were useful to explain the fab behavior after a serious bottleneck breakdown. With that simple model, however, it was only possible to predict the cycle time distribution of the lots for a few scenarios. In this paper, we present some model improvements which lead to a rather good cycle time prediction for a variety of load situations.