A rapid modeling technique for measurable improvements in factory performance
Proceedings of the 30th conference on Winter simulation
Proceedings of the 30th conference on Winter simulation
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Proceedings of the 32nd conference on Winter simulation
Proceedings of the 32nd conference on Winter simulation
Proceedings of the 32nd conference on Winter simulation
Proceedings of the 33nd conference on Winter simulation
Conceptual modeling for simulation: issues and research requirements
Proceedings of the 38th conference on Winter simulation
Improved simple simulation models for semiconductor wafer factories
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Single toolset modeling approaches in semiconductor manufacturing
Proceedings of the Winter Simulation Conference
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ASIC fabs are characterized by multiple process flows. This is mainly due to the highly diversified product portfolios within such fabs. In this study, we first examined the cycle time for individual process flows in a medium volume ASIC fab. We compared these process flows in terms of overall cycle time and using a cycle time index. Secondly, focusing on photolithography we developed a simulation model that employs cycle time data to analyze the impacts of process flow diversity. Thirdly, we used this model to examine the impact on cycle time of changing the volumes of wafer starts on different process flows. The detailed results of simulation experiments along with the concluding remarks are given at the end of the study.