A rapid modeling technique for measurable improvements in factory performance

Criticality of detailed modeling in semiconductor supply chain simulation

Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1

Simulation-based solution of load-balancing problems in the photolithography area of a semiconductor wafer fabrication facility

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Reduced discrete-event simulation models for medium-term production scheduling

Systems Analysis Modelling Simulation

A discrete event simulation model simplification technique

WSC '05 Proceedings of the 37th conference on Winter simulation

Simulation analysis on the impact of furnace batch size increase in a deposition loop

Proceedings of the 38th conference on Winter simulation

An analysis of tool capabilities in the photolithography area of an ASIC fab

Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come

Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model

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Single toolset modeling approaches in semiconductor manufacturing

Proceedings of the Winter Simulation Conference