WIP evolution of a semiconductor factory after a bottleneck workcenter breakdown
Proceedings of the 30th conference on Winter simulation
A rapid modeling technique for measurable improvements in factory performance
Proceedings of the 30th conference on Winter simulation
CONLOAD—a new lot release rule for semiconductor wafer fabs
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Proceedings of the 32nd conference on Winter simulation
Theory of Modelling and Simulation
Theory of Modelling and Simulation
Proceedings of the 33nd conference on Winter simulation
Improved simple simulation models for semiconductor wafer factories
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
An analysis of tool capabilities in the photolithography area of an ASIC fab
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model
Proceedings of the 40th Conference on Winter Simulation
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Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.