Simulation of a semiconductor manufacturing line
Communications of the ACM - Special issue on simulation
A discrete event simulation model simplification technique
WSC '05 Proceedings of the 37th conference on Winter simulation
Improved simple simulation models for semiconductor wafer factories
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Simulation of a full 300MM semiconductor manufacturing plant with material handling constraints
Winter Simulation Conference
Cycle time distributions of semiconductor workstations using aggregate modeling
Winter Simulation Conference
Aggregate modeling of semiconductor equipment using effective process times
Proceedings of the Winter Simulation Conference
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On-time delivery performance of a semiconductor manufacturing system depends on the cycle time distribution of lots produced in the manufacturing network. A detailed simulation model of the manufacturing system that can predict the cycle time distribution may be helpful in performance improvement activities, but requires considerable development and maintenance effort. To reduce development and maintenance effort, an aggregate model has recently been developed that is a lumped-parameter representation of a manufacturing workstation. The lumped-parameters are directly determined from arrival and departure events measured at the workstation in operation. In this paper, we investigate under which conditions the previously developed aggregate model can be used to model a re-entrant flow line of workstations, motivated by semiconductor manufacturing. We find that the range of throughput levels for which accurate cycle time predictions are obtained decreases for increasing network size.