Interoperating simulations of automatic material handling systems and manufacturing processes
Proceedings of the 38th conference on Winter simulation
Two-step simulation method for automatic material handling system of semiconductor fab
Robotics and Computer-Integrated Manufacturing
Simulation analysis of semiconductor manufacturing with small lot size and batch tool replacements
Proceedings of the 40th Conference on Winter Simulation
Simulation analysis of cluster tool operations in wafer fabrication
Proceedings of the 40th Conference on Winter Simulation
Determining an appropriate number of foups in semiconductor wafer fabrication facilities
Proceedings of the 40th Conference on Winter Simulation
Automated generation and parameterization of throughput models for semiconductor tools
Proceedings of the 40th Conference on Winter Simulation
Methodology to best extend AMHS for site expansion
Proceedings of the Winter Simulation Conference
Rapid modeling of field maintenance using discrete event simulation
Proceedings of the Winter Simulation Conference
Single-server aggregation of a re-entrant flow line
Proceedings of the Winter Simulation Conference
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Generally, simulation models encountered in the literature in the context of semiconductor manufacturing are obtained with many assumptions (aggregations) and from partial model simulation of the facility (also called fab). The results obtained can be satisfactory for certain types of studies but, when precise results and understanding of the detailed behavior of local or global parts of the fab are needed, these simplifications may no longer be adequate. A more detailed model and a full-scale simulation are then needed. This article presents a detailed simulation model of the production system and Automated Material Handling System for a 300 mm semiconductor plant. Some of the studies performed with this model are discussed.