Two-step simulation method for automatic material handling system of semiconductor fab

Authors:
Sang Hoon Kong
Affiliations:
Memory Division, Samsung Electronics, Co., San #16, Banwol-dong, Hwasung-city, Gyeonggi-do 445-701, Korea
Venue:
Robotics and Computer-Integrated Manufacturing
Year:
2007

Citing 3
Cited 4

Simulation in automated material handling systems design for semiconductor manufacturing

WSC '94 Proceedings of the 26th conference on Winter simulation
Modeling and simulation of material handling for semiconductor wafer fabrication

WSC '94 Proceedings of the 26th conference on Winter simulation
Multiple response optimization in a fully automated FAB: an integrated tool and vehicle dispatching strategy

Computers and Industrial Engineering

High-fidelity simulation of integrated single-wafer processing tools for evaluation of scheduling algorithms

Robotics and Computer-Integrated Manufacturing
Simulation of a full 300MM semiconductor manufacturing plant with material handling constraints

Winter Simulation Conference
A framework for integrated simulation of production and material handling systems of TFT-LCD fab

Proceedings of the 2011 Summer Computer Simulation Conference
The heuristic preemptive dispatching method of material transportation system in 300 mm semiconductor fabrication

Journal of Intelligent Manufacturing

Quantified Score

Hi-index	0.00

Visualization

Abstract

To design an effective automated material handling system (AMHS) in semiconductor fab, Samsung Electronics has used the commercial AMHS simulation software. Although this tool is very efficient at simulating material handling system, an additional simulation step is required to apply the production logic to the AMHS simulation model. Therefore, this paper introduces one more simulation step, namely the production simulation step. In the production simulation step, the production logic is implemented and the throughput of the semiconductor line can be predicted. The AMHS simulation step follows the production simulation step. In the AMHS simulation step, the capability of AMHS is predicted in advance, based on which the scope of investment can be estimated.