Modeling and simulation of material handling for semiconductor wafer fabrication

• Authors:

• Neal G. Pierce;Richard Stafford

• Affiliations:

• Motorola APRDL, 3501 Ed Bluestein Blvd., MD: K-10, Austin, TX;AutoSimulations, Inc., P.O. Box 307, 655 E. Medical Dr., Bountiful, UT

• Venue:
• WSC '94 Proceedings of the 26th conference on Winter simulation
• Year:
• 1994