Simulation in automated material handling systems design for semiconductor manufacturing
WSC '94 Proceedings of the 26th conference on Winter simulation
Modeling and simulation of material handling for semiconductor wafer fabrication
WSC '94 Proceedings of the 26th conference on Winter simulation
Comparison of dispatching rules for semiconductor manufacturing using large facility models
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Reducing model creation cycle time by automated conversion of a CAD AMHS layout design
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Increasing first pass accuracy of AMHS simulation output using legacy data
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Process and material handling models integration
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 2
Simulation based decision support for future 300mm automated material handling
Proceedings of the 32nd conference on Winter simulation
Response Surface Methodology: Process and Product in Optimization Using Designed Experiments
Response Surface Methodology: Process and Product in Optimization Using Designed Experiments
Robotics and Computer-Integrated Manufacturing
Two-step simulation method for automatic material handling system of semiconductor fab
Robotics and Computer-Integrated Manufacturing
Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system
Computers and Operations Research
A data-driven generic simulation model for logistics-embedded assembly manufacturing lines
Computers and Industrial Engineering
Computers and Operations Research
Performance improvement of a multi product assembly shop by integrated fuzzy simulation approach
Journal of Intelligent Manufacturing
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In today's tight, competitive, and volatile market in semiconductor manufacturing, a successful semiconductor manufacturer has to look into multiple performance indices such as cycle time and on-time delivery. Effective dispatching mechanism is a widely used strategy to achieve these performance indices simultaneously. In the past, dispatching studies in semiconductor manufacturing have primarily focused on the level of tool dispatching. This paper presents an integrated tool and vehicle (ITV) dispatching strategy to consider multiple performance measures in a fully automated fab environment. The ITV dispatching strategy was developed using a state-dependent methodology and multiple response optimization. In order to build a simulation-based automated fab, an integrated modeling approach was proposed to automate both the manufacturing process and the automated material handling system. A case study based on a local fab is described to examine the performance impact of the ITV dispatching rule measured by cycle time, work-in-process, on-time delivery, and lot delivery time. The results of the simulation experiments and analysis show that the ITV dispatching rule is superior to the use of a static dispatching rule, consisting of an average of 15% improvement for on-time delivery and 5% for other performance measures. Furthermore, the proposed modeling framework features high-fidelity, real-time operations and re-configuration; and it can be easily used in other applications.