Simulation in automated material handling systems design for semiconductor manufacturing

Authors:
Gajanana Nadoli;Devadas Pillai
Affiliations:
Design Engineering, Automated Material Handling Systems, Intel Corporation, 5000 W. Chandler Blvd., Chandler, AZ;Design Engineering, Automated Material Handling Systems, Intel Corporation, 5000 W. Chandler Blvd., Chandler, AZ
Venue:
WSC '94 Proceedings of the 26th conference on Winter simulation
Year:
1994

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Abstract