Simulation based decision support for future 300mm automated material handling

Authors:
Mathias Schulz;Timothy D. Stanley;Bernhard Renelt;Roland Sturm;Oliver Schwertschlager
Affiliations:
SEMICONDUCTOR300, Dresden, GERMANY;SEMICONDUCTOR300, Dresden, GERMANY;Infineon Technologies Dresden, Königsbrücker Strasse 180, D - 01099 Dresden, GERMANY;Fraunhofer Institute Manufacturing Engineering and Automation (FhG - IPA), Nobelstrasse 12, D --- 70569 Stuttgart, GERMANY;Fraunhofer Institute Manufacturing Engineering and Automation (FhG - IPA), Nobelstrasse 12, D --- 70569 Stuttgart, GERMANY
Venue:
Proceedings of the 32nd conference on Winter simulation
Year:
2000

Citing 0
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Automated material handling systems: a simulation-based design framework for automated material handling systems in 300mm fabrication facilities

Proceedings of the 35th conference on Winter simulation: driving innovation

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Abstract

Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions between material flow and factory performance. A generic model of a 300mm wafer fabrication facility has been built to support decisions to be made in terms of dimensioning of the potential AMHS solutions.