AutoMod product suite: AutoMod tutorial
Proceedings of the 32nd conference on Winter simulation
Using Manufacturing Process Flow for Time Synchronization in HLA-Based Simulation
DS-RT '05 Proceedings of the 9th IEEE International Symposium on Distributed Simulation and Real-Time Applications
Interoperating autosched AP using the high level architecture
WSC '05 Proceedings of the 37th conference on Winter simulation
Time management in distributed factory simulation, a case study using HLA
WSC '05 Proceedings of the 37th conference on Winter simulation
Symbiotic Simulation Control in Semiconductor Manufacturing
ICCS '08 Proceedings of the 8th international conference on Computational Science, Part III
Preventive what-if analysis in symbiotic simulation
Proceedings of the 40th Conference on Winter Simulation
Predictive-conservative synchronization for commercial simulation package interoperability
Proceedings of the 40th Conference on Winter Simulation
Simulation of a full 300MM semiconductor manufacturing plant with material handling constraints
Winter Simulation Conference
Symbiotic simulation for optimisation of tool operations in semiconductor manufacturing
Proceedings of the Winter Simulation Conference
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To perform a high fidelity simulation study on a 300 mm wafer fabrication plant, modeling of the manufacturing process (MP) alone is not sufficient. Inclusion of the automated material handling system (AMHS) model is necessary due to the high degree of factory automation. There isn't, however, a single tool that is capable of modeling both the AMHS and MP with sufficient accuracy and granularity. A commercial simulation package such as AutoMod is usually used to model the AMHS while AutoSched AP is usually used to model the MP. These packages can be integrated using the supplied interoperation module but flexibility in optimizing the execution performance for different simulation models is lacking. In this paper, we present an approach to interoperation based on the High Level Architecture standard. We note that the typical characteristics of disparity in the models' time granularity and frequent model interactions are the obstacle to good execution performance.