Symbiotic Simulation Control in Semiconductor Manufacturing

Authors:
Heiko Aydt;Stephen John Turner;Wentong Cai;Malcolm Yoke Low;Peter Lendermann;Boon Ping Gan
Affiliations:
School of Computer Engineering, Nanyang Technological University, Singapore 639798;School of Computer Engineering, Nanyang Technological University, Singapore 639798;School of Computer Engineering, Nanyang Technological University, Singapore 639798;School of Computer Engineering, Nanyang Technological University, Singapore 639798;D-SIMLAB Technologies Pte Ltd, Matrix, Singapore 138671;D-SIMLAB Technologies Pte Ltd, Matrix, Singapore 138671
Venue:
ICCS '08 Proceedings of the 8th international conference on Computational Science, Part III
Year:
2008

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Abstract

Semiconductor manufacturing is a highly complex and asset intensive process. Solutions are needed to automate control of equipment and improve efficiency. We describe a symbiotic simulation control system which uses reactive what-if analysis to find a stable configuration of a wet bench tool set. This control system is based on a generic framework for symbiotic simulation. We show that symbiotic simulation can be used to make control decisions in near real-time. Furthermore, we show that our approach yields a notable performance improvement over common practise.