The simulation of integrated tool performance in semiconductor manufacturing
WSC '93 Proceedings of the 25th conference on Winter simulation
Evaluation of cluster tool throughput for thin film head production
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Using simulation and genetic algorithms to improve cluster tool performance
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Proceedings of the 32nd conference on Winter simulation
Proceedings of the 35th conference on Winter simulation: driving innovation
Simulation analysis on the impact of furnace batch size increase in a deposition loop
Proceedings of the 38th conference on Winter simulation
Symbiotic Simulation Control in Semiconductor Manufacturing
ICCS '08 Proceedings of the 8th international conference on Computational Science, Part III
Proceedings of the 40th Conference on Winter Simulation
An optimization framework for waferfab performance enhancement
Proceedings of the 40th Conference on Winter Simulation
Performance improvement for a wet bench tool
Proceedings of the Winter Simulation Conference
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When rigid scheduling rules apply to wet tools, the development of Cycle Time (CT) optimization strategies becomes a relevant challenge. The impact of sequencing optimization on makespan performance at a wet tool is investigated here by means of a hybrid optimization model that combines an exact optimization approach, based on an efficient permutation concept, and a heuristics, based on Genetic Algorithms (GAs). The model also includes a scheduling module that reproduces the control logics governing wet tools operating in a real semiconductor manufacturing plant and proves effective in generating efficient and detailed schedules in short computational times. The realistic assumptions on which the scheduling module is based allow the simulation of different tool configurations. The results obtained show that significant makespan reductions can be achieved by means of a mere sequencing optimization as parallel processing within the wet tools is better exploited.