The simulation of cluster tools: a new semiconductor manufacturing technology
WSC '94 Proceedings of the 26th conference on Winter simulation
Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation
Proceedings of the 35th conference on Winter simulation: driving innovation
Proceedings of the 35th conference on Winter simulation: driving innovation
An event graph based simulation and scheduling analysis of multi-cluster tools
WSC '04 Proceedings of the 36th conference on Winter simulation
Using simulation and hybrid sequencing optimization for makespan reduction at a wet tool
Proceedings of the Winter Simulation Conference
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Getting the most productivity per square foot of clean room space is a common goal for today's semiconductor fabs. Cluster tool throughput is an important factor in a tool's productivity index. Maximizing and accurately predicting throughput is a high priority in the cluster tool market. This paper presents a flexible and sufficiently accurate cluster tool simulation model. The simulation model can run as an emulator, using the real-world cluster tool scheduler (CTS), or as a stand-alone simulation model using a rule-based scheduler. The process of validating the stand-alone simulation rule-based scheduler against the actual cluster tool scheduler is discussed. A comparison between the two schedulers is detailed. Finally, the results, benefits, and limitations of the simulation model are presented.