The simulation of cluster tools: a new semiconductor manufacturing technology

Optimazation and analysis of performance in simulation

Proceedings of the 30th conference on Winter simulation

Using simulation and genetic algorithms to improve cluster tool performance

Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1

Semiconductor process equipment modeling: using emulation to validate a cluster tool simulation model

Proceedings of the 32nd conference on Winter simulation

Cluster tool simulation assists the system design

Proceedings of the 32nd conference on Winter simulation

Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment

Proceedings of the 32nd conference on Winter simulation

Distribution an dmaterial movement applications: efficiently modeling warehouse systems

Proceedings of the 33nd conference on Winter simulation

Modeling methodology: using simulation to understand capacity constraints and improve efficiency on process tools

Proceedings of the 34th conference on Winter simulation: exploring new frontiers

Process equipment modeling: making optimal design decisions for next generation dispensing tools

Proceedings of the 35th conference on Winter simulation: driving innovation

Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation

Proceedings of the 35th conference on Winter simulation: driving innovation

Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing

Proceedings of the 35th conference on Winter simulation: driving innovation

An event graph based simulation and scheduling analysis of multi-cluster tools

WSC '04 Proceedings of the 36th conference on Winter simulation

High-fidelity simulation of integrated single-wafer processing tools for evaluation of scheduling algorithms

Robotics and Computer-Integrated Manufacturing