The simulation of cluster tools: a new semiconductor manufacturing technology
WSC '94 Proceedings of the 26th conference on Winter simulation
Using simulation and genetic algorithms to improve cluster tool performance
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Proceedings of the 32nd conference on Winter simulation
Generating scheduling constraints for discrete event dynamic systems
WSC '04 Proceedings of the 36th conference on Winter simulation
Modeling internet applications with event graphs
FSKD'09 Proceedings of the 6th international conference on Fuzzy systems and knowledge discovery - Volume 5
| Hi-index | 0.00 |
Simulation methods are extensively used in modeling complex scheduling problems. However, traditional layout of simulation models can become complicated when they are used to find optimal scheduling in complex systems such as multi-cluster tools for semiconductor manufacturing. In this paper, we study a decision-moving-done method of event driven simulation for multi-cluster tools. Based on this method, we are able to manage all the activities in the simulation. The proposed event graph based simulation study can further be integrated into a pruning search algorithm to find the optimal robot scheduling sequence. Incorporated with simulation model, the search algorithm detects deadlocks and significantly reduces the computing time. A chemical-mechanical planarization (CMP) polisher is used as an example of the multi-cluster cluster tools to illustrate the proposed event graph based simulation and scheduling analysis.