Development of generic simulation models to evaluate wafer fabrication cluster tools
WSC '92 Proceedings of the 24th conference on Winter simulation
The simulation of cluster tools: a new semiconductor manufacturing technology
WSC '94 Proceedings of the 26th conference on Winter simulation
Using simulation to analyze integrated tool performance in semiconductor manufacturing
Proceedings of symposium D of the 1993 E-MRS spring meeting on Integrated processing for micro and optoelectronics
The simulation of integrated tool performance in semiconductor manufacturing
WSC '93 Proceedings of the 25th conference on Winter simulation
Genetic Algorithms in Search, Optimization and Machine Learning
Genetic Algorithms in Search, Optimization and Machine Learning
Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation
Proceedings of the 35th conference on Winter simulation: driving innovation
Proceedings of the 35th conference on Winter simulation: driving innovation
An event graph based simulation and scheduling analysis of multi-cluster tools
WSC '04 Proceedings of the 36th conference on Winter simulation
Robotics and Computer-Integrated Manufacturing
Using simulation and hybrid sequencing optimization for makespan reduction at a wet tool
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
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