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Finding hidden capacity and maximizing cluster tool throughput is a common goal for today's semiconductor manufacturers. This presentation will discuss a flexible and accurate simulation program capable of modeling a wide range of semiconductor process tools. The simulation program provides visibility and understanding into the internal dependencies and interactions of each process tool. This information provides a solid base from which sound decisions can be made. Simulation results from two case studies will be presented. The real-world capacity improvements, cycle time reductions and cost savings will be presented.