Empirical model-building and response surface
Empirical model-building and response surface
The simulation of cluster tools: a new semiconductor manufacturing technology
WSC '94 Proceedings of the 26th conference on Winter simulation
Using simulation to analyze integrated tool performance in semiconductor manufacturing
Proceedings of symposium D of the 1993 E-MRS spring meeting on Integrated processing for micro and optoelectronics
Electronic design automation using a unified optimization framework
Mathematics and Computers in Simulation
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Simulation models are useful to predict and understand the impact of changes to a manufacturing system. Typical factory simulation models include the parts being manufactured in the factory and the people and resources processing and handling the parts. However, these models do not include equipment or process details, which can affect operational performance such as cycle time and inventory. Separate models are used to evaluate processes and equipment. Thus, it is difficult to evaluate the operational impact of equipment or process changes. However, this information could help factory managers and manufacturing process engineers make better decisions when changing processes or selecting equipment configurations. This paper describes a heterogeneous simulation environment for understanding how equipment and process changes affect the performance of a wafer fabrication facility. This integrated tool incorporates response surface models that describe process behavior, operational and optimization models of equipment behavior, and a discrete-event simulation model of factory operations. Thus, the tool can measure how process changes and equipment configuration changes change the system performance. We have applied this tool to a specific wafer fab problem.