Evaluation of cluster tool throughput for thin film head production

Authors:
Eric J. Koehler;Timbur M. Wulf;Alvin C. Bruska;Marvin S. Seppanen
Affiliations:
Wafer Systems Engineering, Seagate Technology, One Disc Drive, Bloomington, MN;Wafer Systems Engineering, Seagate Technology, One Disc Drive, Bloomington, MN;Wafer Systems Engineering, Seagate Technology, One Disc Drive, Bloomington, MN;Production Systems of Winona, MN, 2225 Garvin Heights Road, Winona, MN
Venue:
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Year:
1999

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Abstract