Evaluation of cluster tool throughput for thin film head production
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Computers and Intractability: A Guide to the Theory of NP-Completeness
Computers and Intractability: A Guide to the Theory of NP-Completeness
Predicting cluster tool behavior with slow down factors
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
A review of scheduling theory and methods for semiconductor manufacturing cluster tools
Proceedings of the 40th Conference on Winter Simulation
Study of optimal load lock dedication for cluster tools
Proceedings of the 40th Conference on Winter Simulation
Coloured Petri Nets: Modelling and Validation of Concurrent Systems
Coloured Petri Nets: Modelling and Validation of Concurrent Systems
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Semiconductor manufacturing is a capital-extensive industry. How to utilize billions of dollars of equipment as efficiently as possible is a critical factor for a semiconductor manufacturer to succeed in stiff competition. Improving performance of manufacturing process increases overall tool throughput, reduces operating costs, and saves companies millions of dollars. In this study, we develop a methodology to analyze and improve a cluster tool's performance. A Colored Petri Net model is developed to determine internal bottleneck resource of the tool. Results conclude that the methodology improves tool efficiency and provides significant cost savings.