Improving cluster tools performance using colored Petri nets in semiconductor manifacturing
Proceedings of the Winter Simulation Conference
Application of tool science techniques to improve tool efficiency for a dry etch cluster tool
Proceedings of the Winter Simulation Conference
Cyclic scheduling of cluster tools with non-identical chamber access times
Proceedings of the Winter Simulation Conference
Discrete Event Dynamic Systems
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Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication processes. We review tool architectures, operational issues, and scheduling requirements. We then explain recent progress in tool science and engineering for scheduling and control of cluster tools.