A comparison study of the logic of four wafer fabrication simulators

Authors:
Scott J. Mason;Paul A. Jensen;John W. Fowler
Affiliations:
Advanced Micro Devices, 5204 East Ben White Boulevard, Mailstop 612, Austin, Texas;The University of Texas at Austin, Mechanical Engineering, Mailcode C2200, Austin, Texas;Industrial & Management Systems Engineering, Arizona State University, Tempe, Arizona
Venue:
WSC '96 Proceedings of the 28th conference on Winter simulation
Year:
1996

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Abstract

Many semiconductor manufacturing companies use one of the following four simulators to aid in analyzing, planning, and operating their manufacturing facilities: Tyecin Systems' ManSim/X, AutoSimulations' AutoSched, Systems Modeling's Wafer Fabrication Template, or Chance Industrial Solution's Delphi, which Wright, Williams, and Kelly now licenses as Factory Explorer. A benchmark study of the four packages was conducted, using actual factory data. The packages each produce different results between replications of the data, due to the data's stochastic nature. The differences which exist between the simulation packages studied in this paper, along with the modeling assumptions required to model the data, caused differences in the experimental output metrics of interest: product cycle time and tool utilization parameters. Some possible reasons are each simulation package's batching logic, setup avoidance rules, and rework occurrence estimators.