Evaluation of modeling, simulation and optimization approaches for work flow management in semiconductor manufacturing

Authors:
Robert Kohn;Daniel Noack;Martin Mosinski;Zhugen Zhou;Oliver Rose
Affiliations:
Dresden University of Technology, Dresden, Germany;Dresden University of Technology, Dresden, Germany;Dresden University of Technology, Dresden, Germany;Dresden University of Technology, Dresden, Germany;Dresden University of Technology, Dresden, Germany
Venue:
Winter Simulation Conference
Year:
2009

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Abstract

Work flow management is one of the key elements that bias the economic competitive position of a fabrication facility, especially in semiconductor manufacturing. This paper presents the goals, methods and challenges of our collaborative project with partners in semiconductor industry. The project activities concern topics in the disciplines of modeling, simulation and optimization classed among work flow management. Our goal is to evaluate suitable methods in the area of modeling, simulation and optimization in use cases given by reality. This project considers future performance prediction using different simulation techniques. In addition several optimization approaches will be evaluated in this project.