Integrated maintenance scheduling for semiconductor manufacturing

  • Authors:
  • Andrew Davenport

  • Affiliations:
  • IBM T. J. Watson Research Center, Yorktown Heights, NY

  • Venue:
  • CPAIOR'10 Proceedings of the 7th international conference on Integration of AI and OR Techniques in Constraint Programming for Combinatorial Optimization Problems
  • Year:
  • 2010

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Abstract

Tools in a manufacturing plant require regular maintenance over their lifespan (e.g. cleaning, calibration, safety checks) in order to keep them running smoothly. In capital intensive industries, such as semi-conductor manufacturing, the scheduling of maintenance operations on the tools used in production is a critical function. Maintenance operations can be expensive to perform, so we should only perform them when necessary. However if maintenance is delayed too long, tools may run sub-optimally or break down (thus requiring even more expensive unplanned, corrective maintenance). Furthermore a tool that is undergoing maintenance may be partly or wholly unavailable for (revenue generating) production operations. We have developed a system to generate maintenance schedules for the IBM East Fishkill, New York 300mm semiconductor manufacturing plant. In the sections which follow, we give a description of the maintenance scheduling problem in semi-conductor manufacturing and discuss some of the challenges in solving it. We present a goal programming approach that incorporates both constraint programming and mixed-integer programming solution technologies. A system we have developed based on this approach is now in use within IBM.