Simulation and the Monte Carlo Method
Simulation and the Monte Carlo Method
A Design Flow for Micromachined Electromechanical Systems
IEEE Design & Test
A Parametric Study of Thermal Effects on the Reliability of RF MEMS Switches
ICMENS '05 Proceedings of the 2005 International Conference on MEMS,NANO and Smart Systems
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A stable, multiple energy domain and multi scale simulation tool for Microsystems is developed. A structured design methodology is adopted for design and optimization of RF MEMS shunt switch and MEMS inductor. The CAD tool developed is a device specific and incorporates physical parameters such as surface roughness. The tool analyzes the impact of surface roughness and also does thermal analysis. These are useful for understanding reliability and failure mechanisms of RF MEMS components.