Genetic Algorithms in Search, Optimization and Machine Learning
Genetic Algorithms in Search, Optimization and Machine Learning
Optimization of Neural Network Structure and Learning Parameters Using Genetic Algorithms
ICTAI '96 Proceedings of the 8th International Conference on Tools with Artificial Intelligence
Design and Analysis of Experiments
Design and Analysis of Experiments
Knowledge and Information Systems
Expert Systems with Applications: An International Journal
Expert Systems with Applications: An International Journal
Expert Systems with Applications: An International Journal
Expert Systems with Applications: An International Journal
Microelectronic Engineering
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The process modeling for the growth rate in pulsed laser deposition (PLD)-grown ZnO thin films was investigated using neural networks (NNets) based on the back-propagation (BP) algorithm and the process recipes was optimized via genetic algorithms (GAs). Two input factors were examined with respect to the growth rate as the response factor. D-optimal experimental design technique was performed and the growth rate was characterized by NNets based on the BP algorithm. GAs was then used to search the desired recipes for the desired growth rate on the process. The statistical analysis for those results was then used to verify the fitness of the nonlinear process model. Based on the results, this modeling methodology can explain the characteristics of the thin film growth mechanism varying with process conditions.