Design and Analysis of Vacuum Robot for Cluster Tools

  • Authors:

  • Jun Wu;Pinkuan Liu;Yulin Wang

  • Affiliations:

  • State Key Lab. of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, P.R. China 200240;State Key Lab. of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, P.R. China 200240;State Key Lab. of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, P.R. China 200240

  • Venue:
  • ICIRA '08 Proceedings of the First International Conference on Intelligent Robotics and Applications: Part I
  • Year:
  • 2008

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Abstract

In this paper, a SCARA type vacuum robot for cluster tools hasbeen designed, which can transfer semiconductor wafers in highvacuum chamber.The robot should be able to perform radial linearextending and retracting movement R, rotation movement θ, andvertically up-down movement Z. The rotation and radial linearmovements are driven by direct drive motors which located inatmosphere environment, two magnetic couplings are applied totransmit the torques from atmosphere to vacuum environment. Thedynamics model of the robot is builded, control system is setup.