Harvester-on-chip: Design of a proof of concept prototype

Authors:
G. Murillo;G. Abadal;F. Torres;J. L. Lopez;J. Giner;A. Uranga;N. Barniol
Affiliations:
Departament d'Enginyeria Electrònica, ETSE, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Bellaterra, Spain;Departament d'Enginyeria Electrònica, ETSE, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Bellaterra, Spain;Departament d'Enginyeria Electrònica, ETSE, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Bellaterra, Spain;Departament d'Enginyeria Electrònica, ETSE, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Bellaterra, Spain;Departament d'Enginyeria Electrònica, ETSE, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Bellaterra, Spain;Departament d'Enginyeria Electrònica, ETSE, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Bellaterra, Spain;Departament d'Enginyeria Electrònica, ETSE, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Bellaterra, Spain
Venue:
Microelectronic Engineering
Year:
2009

Citing 3
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Abstract

The main features of a novel concept in integrated MEMS-CMOS energy scavenging systems are presented. In this new concept, named harvester-on-chip (HoC), a chip only dedicated to scavenging functions, which co-integrate the MEMS electrostatic energy micro-converter along with the CMOS power conditioning circuitry, is defined. The use of the whole chip mass as inertial mass and the possibility to integrate an array of electrostatic harvesting transducers in the full chip surface are analyzed as main advantages of the new scavenger idea. The design and fabrication results of a proof of concept system integrated in a commercial CMOS technology are reported.