Vibration-to-electric energy conversion

  • Authors:
  • Scott Meninger;Rajeevan Amirtharajah;Anantha P. Chandrakasan;Jeffrey H. Lang;Jose Oscar Mur-Miranda

  • Affiliations:
  • Massachussetts Institute of Technology, Cambridge, MA;Massachussetts Institute of Technology, Cambridge, MA;Massachussetts Institute of Technology, Cambridge, MA;Massachussetts Institute of Technology, Cambridge, MA;Massachussetts Institute of Technology, Cambridge, MA

  • Venue:
  • IEEE Transactions on Very Large Scale Integration (VLSI) Systems - Special issue on low power electronics and design
  • Year:
  • 2001

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Abstract

A system is proposed to convert ambient mechanical vibration into electrical energy for use in powering autonomous low power electronic systems. The energy is transduced through the use of a variable capacitor. Using microelectromechanical systems (MEMS) technology, such a device has been designed for the system. A low-power controller IC has been fabricated in a 0.6-/spl mu/m CMOS process and has been tested and measured for losses. Based on the tests, the system is expected to produce 8 /spl mu/W of usable power. In addition to the fabricated programmable controller, an ultra low-power delay locked loop (DLL)-based system capable of autonomously achieving a steady-state lock to the vibration frequency is described.