Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

Authors:
Hua-Bin Fang;Jing-Quan Liu;Zheng-Yi Xu;Lu Dong;Li Wang;Di Chen;Bing-Chu Cai;Yue Liu
Affiliations:
National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai ...;National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai ...;ACS Sensors Lab, Honeywell, Shanghai 201203, PR China;National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai ...;ACS Sensors Lab, Honeywell, Shanghai 201203, PR China;National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai ...;National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai ...;ACS Sensors Lab, Honeywell, Shanghai 201203, PR China
Venue:
Microelectronics Journal
Year:
2006

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Abstract

A MEMS-based energy harvesting device, micro piezoelectric power generator, is designed to convert ambient vibration energy to electrical power via piezoelectric effect. In this work, the generator structure of composite cantilever with nickel metal mass is devised. Micro-electronic-mechanical systems (MEMS) related techniques such as sol-gel, RIE dry etching, wet chemical etching, UV-LIGA are developed to fabricate the device and then its performance is measured on vibration testing setup. The investigation shows that the designed device is expected to resonantly operate in low-frequency environmental vibration through tailoring the structure dimension. Under the resonant operation with frequency of about 608Hz, a first prototype of the generator result in about 0.89V AC peak-peak voltage output to overcome germanium diode rectifier toward energy storage, and its power output is in microwatt level of 2.16@mW.