Hierarchical test sequencing for complex systems

  • Authors:
  • R. Boumen;S. Ruan;I S. M. De Jong;J. M. Van De Mortel-Fronczak;J. E. Rooda;K. R. Pattipati

  • Affiliations:
  • ASML Netherlands B.V., Veldhoven, The Netherlands and Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, The Netherlands;Department of Revenue Management and Planning, American Airlines, TX and Department of Electrical and Computer Engineering, University of Connecticut, Storrs, CT;Eindhoven University of Technology, Eindhoven, The Netherlands and ASML Netherlands B.V., Veldhoven, The Netherlands;Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, The Netherlands;Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, The Netherlands;University of Connecticut, Storrs, CT

  • Venue:
  • IEEE Transactions on Systems, Man, and Cybernetics, Part A: Systems and Humans
  • Year:
  • 2009

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Abstract

Testing complex systems, such as the ASML TWINSCAN lithographic machine, is expensive and time consuming. In a previous work, a test sequencing method to calculate time-optimal test sequences has been developed. Because complex systems are composed of several subsystems, which are again composed of several modules, there exists a need to hierarchically model test sequencing problems. Such a hierarchical test sequencing problem consists of a high-level model that describes a test sequencing problem at the system level, and one or more low-level models that describe the test sequencing problems at the subsystem or module level. The tests at the system level correspond to the solutions of low-level problems. This paper describes a hierarchical test sequencing model and proposes two algorithms to compute an optimal test sequence. The benefits of hierarchically modeling a problem are less computational effort and less modeling effort, because not all relations are needed. This is illustrated by a small example. The industrial relevance of this method is illustrated on a case study related to a manufacturing testing phase of a lithographic machine.