Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

Authors:
Y. Tian;B. Shirinzadeh;D. Zhang
Affiliations:
Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC 3800, Australia and School of Mechanical Engineering, Tianjin Uni ...;Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC 3800, Australia;School of Mechanical Engineering, Tianjin University, Tianjin 300072, China
Venue:
Microelectronic Engineering
Year:
2010

Citing 2
Cited 3

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A compliant-mechanism-based three degree-of-freedom manipulator for small-scale manipulation

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Stiffness analysis of a compliant precision positioning stage

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Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism

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Dynamic Performance Evaluation of a Parallel Manipulator with Non Axial Symmetrical Characteristics by Computing the Respective Actuating Joint Capability

International Journal of Intelligent Mechatronics and Robotics

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Abstract

This paper presents the mechanical design and dynamics of a 3-DOF (degree of freedom) flexure-based parallel mechanism. Flexure hinges are used as the revolute joints to provide smooth and high accurate motion with nanometer level resolution. Three piezoelectric actuators are utilized to drive active links of the flexure-based mechanism. The inverse dynamics of the proposed mechanism is established by simplifying flexure hinges into ideal revolute joints with constant torsional stiffnesses. Finite element analysis is used to validate the performance of the proposed 3-DOF flexure-based parallel mechanism. The interaction between the actuators and the flexure-based mechanism is extensively investigated based on the established model. Experiments are carried out to verify the dynamic performance of the 3-DOF flexure-based mechanism.